Overview

The underlying technology in Boston Microsystems PicoSensor platform was developed and optimized over a ten year period with a cumulative investment of over $12M. The PicoSensor technology is predicated on the principle that the detection and measurement of trace amounts of chemical molecules can best be done at microscopic levels. The PicoSensor is a microscopic mass , manufactured using equipment and processes developed for the semiconductor industry, capable of measuring miniscule mass changes induced by reactions with chemical analytes. The underlying technology, originally developed at the MIT Department of Materials Science and Engineering, is licensed exclusively to Boston MicroSystems.

Silicon Carbide MEMS

PicoSensor MEMS components are manufactured with silicon carbide, a diamond-hard semiconductor material. BMS has developed proprietary, patented techniques for fabricating silicon carbide-based MEMS devices with integrated actuator and sensing layers, offering reliable and long-lasting devices with the ability to withstand high temperatures and harsh environments.

Boston MicroSystems MEMS Components

Our PicoSensor technology consists of three separate MEMS components, that can be used either individually or combined together in co-packaged systems, depending on the analytes(s), background, and operating conditions of interest. These three components are:

* PicoSensor Detector Array

The PicoSensor Detector Array is a MEMS-cantilever (microresonator) structure consisting of three layers:

- First, a base is formed using silicon carbide, a diamond-hard semiconductor material. BMS has developed proprietary, patented techniques, for making these devices from this unique material. This makes our sensors reliable, long lasting, and able to withstand harsh environments.

- A top layer of chemically sensitive film is able to capture the specific chemical target of interest. Selecting and depositing the appropriate film requires a depth of expertise and experience developed by BMS.

- Sandwiched between these two layers is a thin actuator layer composed of piezoelectric aluminum nitride that is capable of converting changes in the mass of the micro resonator (when a target chemical attaches to the chemically sensitive film) into an electrical signal.

A distinguishing feature of the PicoSensor technology is that the sensor is an array of up to eight individual resonators, each which can be coated with a different film and thus can detect a different target. Unlike most chemical sensors which can only detect one target, a PicoSensor can be designed to detect and distinguish between many different chemical targets.

* Preconcentrator (Microconcentrator)

Preconcentrators are chemical sponges that collect chemicals from the air and then rapidly desorb them when heated. Chemicals are collected onto high surface are flow-through membranes which have integrated heaters and temperature sensors for precise thermal control. The preconcentrators can be heated above 400C, consume approximately 100mW, and rapidly heat and cool in tens of milliseconds. Boston MicroSystems preconcentrators are available in a wide range of sizes, collection capacities, and with a variety of chemoselective coatings tailored for customer applications.

* Microfluidic Sensor

The BMS MicroFluidic Sensor is a sensor that can withstand the rigors of operating in a wide variety of chemically aggressive fluidic environments, including chemical reactors, engines, hydraulic systems, refineries, food processing equipment, HVAC compressors and oil wells. These sensors can be used to monitor viscosity and density changes in liquids and detect the presence of trace contaminants in fluids.